Titel: |
A combined positron microprobe - Scanning electron microscope for positron-annihilation spectroscopy with a spatial resolution in the micron range |
Autor(en): |
H. Greif , M. Haaks , U. Holzwarth, U. Männig , M. Tongbhoyai und K. Maier |
Journal: |
Mater. Sci. Forum |
Jahr: |
1997 |
Band: |
255-2 |
Seite(n): |
641-643 |
DOI: |
10.4028/www.scientific.net/MSF.255-257.641 |
Datei / URL: |
http://www.scientific.net/MSF.255-257.641 |
Zusammenfassung: |
In cooperation with the ZEISS/LEO GmbH a positron microprobe has been developed which allows positron annihilation measurements with a spatial resolution in the micron range. Therefore, a commercially available scanning electron microscope (SEM) has been modified and equipped with an additional facility for positron-annihilation measurements. A Na-22 source and a cylindrical tungsten moderator have been integrated in the electron optical system of the SEM which now may be used in the conventional SEM-mode to image a specimen and in another mode to perform local positron-annihilation measurements. As a first test the fatigue damage in a copper plate after a three-point bending test was investigated with the positron microbeam. The profile of the S-parameter along the cross section of the copper plate coincides well with the expected feature of the damage distribution. |