Title: |
A combined positron microprobe - Scanning electron microscope for positron-annihilation spectroscopy with a spatial resolution in the micron range |
Author(s): |
H. Greif , M. Haaks , U. Holzwarth, U. Männig , M. Tongbhoyai and K. Maier |
Journal: |
Mater. Sci. Forum |
Year: |
1997 |
Volume: |
255-2 |
Pages: |
641-643 |
DOI: |
10.4028/www.scientific.net/MSF.255-257.641 |
File URL: |
http://www.scientific.net/MSF.255-257.641 |
Abstract: |
In cooperation with the ZEISS/LEO GmbH a positron microprobe has been developed which allows positron annihilation measurements with a spatial resolution in the micron range. Therefore, a commercially available scanning electron microscope (SEM) has been modified and equipped with an additional facility for positron-annihilation measurements. A Na-22 source and a cylindrical tungsten moderator have been integrated in the electron optical system of the SEM which now may be used in the conventional SEM-mode to image a specimen and in another mode to perform local positron-annihilation measurements. As a first test the fatigue damage in a copper plate after a three-point bending test was investigated with the positron microbeam. The profile of the S-parameter along the cross section of the copper plate coincides well with the expected feature of the damage distribution. |