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Title: A combined positron microprobe - Scanning electron microscope for positron-annihilation spectroscopy with a spatial resolution in the micron range
Author(s): H. Greif Person, M. Haaks Person, U. Holzwarth, U. Männig Person, M. Tongbhoyai Person and K. Maier Person
Journal: Mater. Sci. Forum
Year: 1997
Volume: 255-2
Pages: 641-643
DOI: 10.4028/www.scientific.net/MSF.255-257.641
File URL: http://www.scientific.net/MSF.255-257.641
Abstract: In cooperation with the ZEISS/LEO GmbH a positron microprobe has been developed which allows positron annihilation measurements with a spatial resolution in the micron range. Therefore, a commercially available scanning electron microscope (SEM) has been modified and equipped with an additional facility for positron-annihilation measurements. A Na-22 source and a cylindrical tungsten moderator have been integrated in the electron optical system of the SEM which now may be used in the conventional SEM-mode to image a specimen and in another mode to perform local positron-annihilation measurements. As a first test the fatigue damage in a copper plate after a three-point bending test was investigated with the positron microbeam. The profile of the S-parameter along the cross section of the copper plate coincides well with the expected feature of the damage distribution.

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